Design, fabrication and performance of flexible pressure sensors based on microstructures

JIN Fan; LV Dawu; ZHANG Tiancheng; SHEN Wenfeng; LI Jia; TAN Ruiqin

doi:10.13801/j.cnki.fhclxb.20210520.004

Volume 38 Issue 10

Oct. 2021

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Article Navigation > Acta Materiae Compositae Sinica > 2021 > 38(10): 3133-3150

JIN Fan, LV Dawu, ZHANG Tiancheng, et al. Design, fabrication and performance of flexible pressure sensors based on microstructures[J]. Acta Materiae Compositae Sinica, 2021, 38(10): 3133-3150. doi: 10.13801/j.cnki.fhclxb.20210520.004

Citation:

JIN Fan, LV Dawu, ZHANG Tiancheng, et al. Design, fabrication and performance of flexible pressure sensors based on microstructures[J]. Acta Materiae Compositae Sinica, 2021, 38(10): 3133-3150. doi: 10.13801/j.cnki.fhclxb.20210520.004

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Design, fabrication and performance of flexible pressure sensors based on microstructures

doi: 10.13801/j.cnki.fhclxb.20210520.004

JIN Fan^1
,,
LV Dawu^2
,,
ZHANG Tiancheng^1
,,
SHEN Wenfeng^2
,,
LI Jia^2
,,
TAN Ruiqin^{1
,
,}

1.
Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China
2.
Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China

Received Date: 2021-03-19
Accepted Date: 2021-05-14

Available Online: 2021-05-21

Publish Date: 2021-10-01

Abstract

Abstract

With the rapid development of science and technology, electronic skin and flexible wearable devices have attracted wide attention because of their important applications in human motion, health monitoring, intelligent robots and other fields. The traditional pressure sensors based on noble metal or metal oxide semiconductor have high cost or poor flexibility, while the flexible pressure sensors based on microstructures have the advantages of high sensitivity, wide strain range, low cost, low power consumption and fast response, which play an important role in electronic skin and flexible wearable devices and have become one of the main research hotspots of materials and devices in flexible electronics. This review systematically summarizes the important progress made in the material selection, structural design, preparation methods and sensing performance of flexible pressure sensors based on different flexible substrate microstructures such as pyramid, microsphere, micro-column, bionic structure and fold and porous conductive polymer materials. Finally, the future development of flexible pressure sensors is prospected.
- wearable device,
- flexible pressure sensor,
- conductive polymer,
- functional nanocomposite,
- microstructure
Long Abstrsct
Innovation Points

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References(91)

References

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