Citation: | QIN Yafei, ZENG Yu, WANG Dong, et al. Bonding and strain behavior of graphene/boron nitride diaphragm of micro-electro-mechanical system pressure sensor[J]. Acta Materiae Compositae Sinica, 2022, 39(7): 3330-3338. doi: 10.13801/j.cnki.fhclxb.20210913.001 |
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