Volume 38 Issue 7
Jul.  2021
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LI Ruiqing, LI Siming, CHEN Tianjiao, et al. Flexible capacitive pressure sensor based on expandable microsphere/ polydimethylsiloxane composite dielectric layer[J]. Acta Materiae Compositae Sinica, 2021, 38(7): 2152-2161. doi: 10.13801/j.cnki.fhclxb.20201110.005
Citation: LI Ruiqing, LI Siming, CHEN Tianjiao, et al. Flexible capacitive pressure sensor based on expandable microsphere/ polydimethylsiloxane composite dielectric layer[J]. Acta Materiae Compositae Sinica, 2021, 38(7): 2152-2161. doi: 10.13801/j.cnki.fhclxb.20201110.005

Flexible capacitive pressure sensor based on expandable microsphere/ polydimethylsiloxane composite dielectric layer

doi: 10.13801/j.cnki.fhclxb.20201110.005
  • Received Date: 2020-08-03
  • Accepted Date: 2020-10-28
  • Available Online: 2020-11-10
  • Publish Date: 2021-07-15
  • In order to solve the problem of narrow working pressure range of microstructured flexible capacitive pressure sensors, a flexible “sandwich” structure capacitive pressure sensor based on expandable microsphere/polydimethylsiloxane (PDMS) dielectric layer was designed in this paper. Then the structure and morphology of the expandable microsphere/PDMS dielectric layer were characterized. The mechanical and electrical properties of the expandable microsphere/PDMS dielectric layer sensor based on expandable microsphere/PDMS dielectric layer were tested by self-built pressure and capacitance acquisition equipment. The results show that the Young’s modulus of the expandable microsphere/PDMS dielectric layer is significantly reduced due to the addition of expandable microsphere into PDMS, and the dielectric constant of the expandable microsphere/PDMS dielectric layer is increased under pressure. The working pressure range of the expandable microsphere/PDMS dielectric layer sensor is up to 400 kPa, and the maximum sensitivity reaches 0.06 kPa−1. The expandable microsphere/PDMS dielectric layer sensor has good repeatability and stability under the load cycle of 100 kPa, and low hysteresis (4.7%). It can detect fingertip pressure accurately and rapidly, which has potential applications in areas of life and health.

     

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