Sm-doped core-shell structured mesoporous SiO<sub>2</sub>@CeO<sub>2</sub> composite particles: Preparation and polishing performance

CHEN Ailian; WANG Wanying; MA Xiangyu; CAI Wenjie; CHEN Yang

doi:10.13801/j.cnki.fhclxb.20190730.001

Volume 37 Issue 4

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CHEN Ailian, WANG Wanying, MA Xiangyu, et al. Sm-doped core-shell structured mesoporous SiO2@CeO2 composite particles: Preparation and polishing performance[J]. Acta Materiae Compositae Sinica, 2020, 37(4): 919-926. doi: 10.13801/j.cnki.fhclxb.20190730.001

Citation:

CHEN Ailian, WANG Wanying, MA Xiangyu, et al. Sm-doped core-shell structured mesoporous SiO₂@CeO₂ composite particles: Preparation and polishing performance[J]. Acta Materiae Compositae Sinica, 2020, 37(4): 919-926. doi: 10.13801/j.cnki.fhclxb.20190730.001

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Sm-doped core-shell structured mesoporous SiO₂@CeO₂ composite particles: Preparation and polishing performance

doi: 10.13801/j.cnki.fhclxb.20190730.001

1.
School of Mechanical Engineering, Changzhou University, Changzhou 213164, China;
2.
Jiangsu Key Laboratory of Green Process Equipment, Changzhou University, Changzhou 213164, China;
3.
School of Materials Science and Engineering, Changzhou University, Changzhou 213164, China

Received Date: 2019-04-30
Publish Date: 2020-04-15

Abstract

Abstract

The mesoporous silica (mSiO₂) microspheres were grafted with the Sm-doped CeO₂ nanoparticles via a facile and efficient co-precipitation approach. The uniform non-rigid mSiO₂@Ce_{1-xSm_xO₂(x=0, 0.23) composite particles with a well-defined core-shell structure were obtained. The resulting samples were characterized in terms of powder XRD, SEM, HRTEM, STEM-EDX Mapping, Raman, and N₂ adsorption-desorption measurements. The effects of Sm doping on the polishing performance of mSiO₂@Ce_{1-xSm_xO₂(x=0, 0.23) composite abrasives were evaluated using AFM and three-dimensional noncontact interferometric microscope. The ultra-precision and high-efficiency polishing mechanisms of the Sm-doped abrasives were also discussed. The polishing results show that the Sm doping contributes to 36% increment of the removal rate which is 84 nm/min compared to the undoped composites. The Sm-doped abrasives achieve an atomic-scale surface finish, and the average roughness and root-mean-square roughness of the polished SiO₂ films are 1.4 and 0.17 nm, respectively.}}
- CeO₂,
- doping,
- composite abrasive,
- core-shell structure,
- polishing
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