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W掺杂Cr2O3薄膜的制备及其在异丁烯气体检测中的应用

王鹏家 彭宝营 吴伟 巩亚东

王鹏家, 彭宝营, 吴伟, 等. W掺杂Cr2O3薄膜的制备及其在异丁烯气体检测中的应用[J]. 复合材料学报, 2023, 40(8): 4549-4557. doi: 10.13801/j.cnki.fhclxb.20221209.001
引用本文: 王鹏家, 彭宝营, 吴伟, 等. W掺杂Cr2O3薄膜的制备及其在异丁烯气体检测中的应用[J]. 复合材料学报, 2023, 40(8): 4549-4557. doi: 10.13801/j.cnki.fhclxb.20221209.001
WANG Pengjia, PENG Baoying, WU Wei, et al. Synthesis of W-doped Cr2O3 thin films and their application in isobutylene sensing[J]. Acta Materiae Compositae Sinica, 2023, 40(8): 4549-4557. doi: 10.13801/j.cnki.fhclxb.20221209.001
Citation: WANG Pengjia, PENG Baoying, WU Wei, et al. Synthesis of W-doped Cr2O3 thin films and their application in isobutylene sensing[J]. Acta Materiae Compositae Sinica, 2023, 40(8): 4549-4557. doi: 10.13801/j.cnki.fhclxb.20221209.001

W掺杂Cr2O3薄膜的制备及其在异丁烯气体检测中的应用

doi: 10.13801/j.cnki.fhclxb.20221209.001
基金项目: 宁夏自然科学基金(2022 AAC03344);北京市教委科技计划(KM202011232012);国家自然科学基金(51405026)
详细信息
    通讯作者:

    彭宝营,博士,副教授,硕士生导师,研究方向为纳米复合材料制备及应用、绿色制造技术 E-mail: pengbaoying@yeah.net

  • 中图分类号: TB332

Synthesis of W-doped Cr2O3 thin films and their application in isobutylene sensing

Funds: Natural Science Foundation of Ningxia (2022 AAC03344); Beijing Municipal Education Commission Project (KM202011232012); National Natural Science Foundation of China (51405026)
  • 摘要: 为了实现对异丁烯气体的有效检测,采用气溶胶辅助化学气相沉积(AACVD)技术在氧化铝基底表面合成氧化铬(Cr2O3)及W掺杂Cr2O3(W/Cr2O3)薄膜。通过SEM、TEM、XRD及XPS等检测手段对Cr2O3及W/Cr2O3薄膜的微观形貌、晶体结构和元素结合价态进行分析。结果表明:Cr2O3薄膜厚度约为20 μm,由粒径为50 nm左右的纳米颗粒组成,其结构较松散,而W掺杂Cr2O3后所获薄膜结构致密,颗粒粒径约为15 nm,尺寸明显减小,Cr2O3及W/Cr2O3薄膜均具有单一的六方相晶体结构。气敏测试结果表明,在400℃工作温度条件下,基于W/Cr2O3薄膜所制备的气体传感器相较于Cr2O3气体传感器对2×10−5异丁烯的灵敏度由原来的1.11提升为3.55,并展现出良好的稳定性、抗湿性和气体选择性。

     

  • 图  1  气溶胶辅助化学气相沉积的反应原理图

    MFC—Mass flow controller

    Figure  1.  Reaction schematic diagram of an aerosol-assisted chemical vapor deposition

    图  2  气体传感器结构示意图

    Figure  2.  Structure schematic diagram of gas sensor

    图  3  Cr2O3薄膜的SEM表面图像(a)和截面图像(b);W/Cr2O3薄膜的SEM图像(c)和TEM图像(d)

    Figure  3.  SEM surface image (a) and cross section image (b) of Cr2O3 thin film; SEM image (c) and TEM image (d) of W/Cr2O3 thin film

    图  4  Cr2O3和W/Cr2O3薄膜在衍射角为21°~66° (a)和30°~40° (b)范围内的XRD图谱

    Figure  4.  XRD patterns of Cr2O3 and W/Cr2O3 thin films in the diffraction angles of 21°-66° (a) and 30°-40° (b)

    图  5  Cr2O3和W/Cr2O3薄膜:(a) Cr2p能谱;(b) O1s能谱;W/Cr2O3薄膜:(c) W4f能谱

    Figure  5.  Cr2O3 and W/Cr2O3 thin films: (a) Cr2p spectra; (b) O1s spectra; W/Cr2O3 thin film: (c) W4f spectrum

    图  6  Cr2O3和W/Cr2O3气体传感器在不同工作温度条件下对2×10−5 C4H8气体的灵敏度

    Rg—Resistance value in C4H8 gas; Ra—Resistance value in air

    Figure  6.  Sensitivity of Cr2O3 and W/Cr2O3 gas sensors towards 2×10−5 C4H8 at different operating temperatures

    图  7  (a) Cr2O3和W/Cr2O3气体传感器在最佳工作温度条件下对不同浓度C4H8气体的灵敏度变化曲线;(b) C4H8气体浓度与灵敏度之间的拟合曲线

    Figure  7.  (a) Sensitivity curves of Cr2O3 and W/Cr2O3 gas sensors towards different concentrations of C4H8 gas at the optimal working temperature; (b) Fitting lines between C4H8 gas concentration and sensitivity

    图  8  不同工作温度及不同C4H8浓度条件下Cr2O3气体传感器(a)和W/Cr2O3气体传感器(b)对C4H8气体的灵敏度变化曲线

    Figure  8.  Sensitivity curves of Cr2O3 gas sensors (a) and W/Cr2O3 gas sensors (b) towards C4H8 gas at different working temperatures and different concentrations

    图  9  Cr2O3 (a)和W/Cr2O3 (b)气体传感器在不同相对湿度条件下对8×10−5 C4H8气体的灵敏度

    Figure  9.  Sensitivity of Cr2O3 (a) and W/Cr2O3 (b) gas sensors to 8×10−5 C4H8 gas at different relative humidity

    图  10  Cr2O3和W/Cr2O3气体传感器在400℃对不同被检测气体的选择性

    Figure  10.  Selectivity of Cr2O3 and W/Cr2O3 gas sensors towards different detected gases at 400℃

    图  11  气敏反应机制图:(a) Cr2O3薄膜;(b) W/Cr2O3薄膜

    Figure  11.  Schematic illustration of gas sensing mechanism: (a) Cr2O3 thin film; (b) W/Cr2O3 thin film

    表  1  传感器的重复性和一致性

    Table  1.   Repeatability and consistency of gas sensors

    SensorRepeatability RSD/%Average responseConsistency RSD/%
    Cr2O3-10.721.043.42
    Cr2O3-21.271.11
    Cr2O3-30.491.05
    W/Cr2O3-13.513.673.56
    W/Cr2O3-24.943.49
    Note: RSD—Relative standard deviation.
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出版历程
  • 收稿日期:  2022-09-14
  • 修回日期:  2022-11-07
  • 录用日期:  2022-11-30
  • 网络出版日期:  2022-12-14
  • 刊出日期:  2023-08-15

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