基于掺杂石墨烯的铌镁酸铅钛酸铅(PMN-xPT)柔性压电薄膜的制作与特性研究

Fabrication and Study of Properties of Graphene-Doped PMN-xPT Flexible Piezoelectric Thin Films

  • 摘要: 针对传统刚性传感器质量较大,结构受限,而柔性复合压电薄膜传感器有质量轻,良好的机械特性;且传统柔性压电薄膜传感器制作成本高,工艺复杂,本研究采用一种简单低成本的方法,制作了基于铌镁酸铅-钛酸铅(PMN-xPT)压电陶瓷粉体、高电子迁移率的石墨烯(Gr)和聚二甲基硅氧烷(PDMS)柔性基底的高性能柔性压电薄膜(0.67PMN-0.33PT-Gr/PDMS)。该薄膜基于“压电相-导电相-柔性基体”三元复合体系的设计理念。利用具有高压电常数的PMN-xPT陶瓷粉体(经两步固相法抑制焦绿石相)与石墨烯(Gr)共同与PDMS混合,形成铝电极/(0.67PMN-0.33PT-Gr/PDMS)/ITO-PET复合薄膜结构。其核心机制在于:PMN-xPT作为压电相提供极化电荷;石墨烯作为导电相,通过形成网络显著降低薄膜体电阻,促进电荷收集与传输;PDMS则作为柔性基体,承受应变并将应力有效传递至压电颗粒。实验证明,此柔性压电薄膜能有效将人体动作(如手指弯曲)转化为电信号,产生高达7.7 V的电压和120 nA的电流响应(比未掺入石墨烯输出电压提升了2.95倍,输出电流提升了3倍)。经过1000次重复弯曲测试,其输出电压稳定维持在7.7 V±0.2 V(波动≤±2.6%),输出电流保持在120 nA±5 nA(波动≤±4.2%),展现出优异的力学性能。该柔性、高性能的压电薄膜为开发自供电可穿戴运动传感器、健康监测设备及医疗植入物传感器提供了有效的解决方案。

     

    Abstract: Conventional rigid sensors are often limited by their heavy weight and constrained structures, whereas flexible composite piezoelectric film sensors offer advantages of light weight and excellent mechanical properties; however, traditional flexible piezoelectric film sensors typically involve high fabrication costs and complex processes. This study aimed to develop a high-performance flexible piezoelectric film using a simple, low-cost method, fabricating a film based on lead magnesium niobate–lead titanate (PMN-xPT) piezoelectric ceramic powder, high-electron-mobility graphene (Gr), and a polydimethylsiloxane (PDMS) flexible substrate (0.67PMN-0.33PT-Gr/PDMS), following a "piezoelectric phase–conductive phase–flexible matrix" ternary composite design. PMN-xPT ceramic powder, synthesized via a two-step solid-state reaction to suppress the pyrochlore phase, was combined with graphene and mixed into PDMS to form an aluminum electrode/(0.67PMN-0.33PT-Gr/PDMS)/ITO-PET composite film structure, wherein PMN-xPT serves as the piezoelectric phase providing polarization charges, graphene acts as the conductive phase forming a network that significantly reduces bulk resistance and promotes charge collection and transport, and PDMS functions as the flexible matrix that withstands strain and effectively transfers stress to the piezoelectric particles. Experimentally, the flexible piezoelectric film effectively converted human motion, such as finger bending, into electrical signals, generating a high output voltage of 7.7 V and a current response of 120 nA, which represents a 2.95-fold increase in voltage and a 3-fold increase in current compared to the film without graphene. After 1000 repeated bending cycles, the output voltage remained stable at 7.7 V±0.2 V (fluctuation≤±2.6%) and the output current was maintained at 120 nA±5 nA (fluctuation≤±4.2%), demonstrating excellent mechanical durability. This flexible, high-performance piezoelectric film thus provides an effective solution for developing self-powered wearable motion sensors, health monitoring equipment, and medical implantable sensors.

     

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