利用空气层结构和碳纳米管修饰实现复合柔性压力传感器超宽检测范围

Ultra-wide range composite flexible pressure sensor based on air layer structure and carbon nanotube modified dielectric layer

  • 摘要: 宽检测范围和高灵敏度是保证柔性压力传感器在多种应用场景内保持高分辨率和高精度的关键参数。虽然目前已探索了多种微结构和复合材料介质层以提高传感器的灵敏度,但检测范围普遍较窄,并且宽检测范围和高灵敏度二者相互制约的问题始终无法解决。为此,设计了一种由空气层和多壁碳纳米管(MWCNTs)修饰的聚(偏二氟乙烯-三氟乙烯)(P(VDF-TrFE))复合膜共同作为介质层的电容式柔性压力传感器。压力载荷下,空气层和复合介质层协同作用,使传感器检测范围从0.1~3.6 MPa扩宽至0.1~10 MPa,是目前已报道柔性压力传感器的最宽检测范围。同时,传感器在0.1~0.5 MPa和0.5~10 MPa范围内均展现出1.673 MPa−1和0.302 MPa−1的较高灵敏度及优异的线性度。此外,考虑到实际应用,还开发了一套电容式压力传感器应力在线监测系统,准确性也达到了95.0% 以上。基于传感器及其检测系统的开发与设计,成功展示了传感器在柔性电子器件领域和微小压力监测领域的潜在应用。

     

    Abstract: A wide detecting range and high sensitivity are crucial factors to fabricate the flexible pressure sensors with high resolution and precision across various application scenarios. Despite the exploration of numerous microstructures and composite material mediums to enhance the sensitivity of pressure sensors, the detection range has remained narrow, because of the constraint between wide detection range and high sensitivity. In this study, a capacitive flexible pressure sensor with ultra-wide detecting range have been developed, where a multi-walled carbon nanotubes (MWCNTs) reinforced poly(vinylidene fluoride-co-trifluoroethylene) (P(VDF-TrFE)) composite was used as the dielectric layer. At same time, to enhance the sensitivity, an air layer was introduced between dielectric layer and packager layers. Consequently, the detected range as-fabricated sensor could reach to 0.1-10 MPa, which was wider than those of the reported flexible sensors. Additionally, it exhibits a high sensitivity (1.673 MPa−1 and 0.302 MPa−1) and excellent linearity in the ranges of 0.1-0.5 MPa and 0.5-10 MPa, respectively. Furthermore, an online monitoring system for capacitive pressure sensor stress was designed, of which the accuracy reached up to 95.0%. Based on these results, the designed sensor and detecting system exhibited the potential applications flexible electronic devices and miniature pressure monitoring devices.

     

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