SiC基复合器件在高功率激光系统中的集成应用

SiC heat sinks in high-power laser systems

  • 摘要: 为解决高功率激光系统向更高功率、更高亮度演进过程中面临的热管理瓶颈,本文系统综述了碳化硅(SiC)热沉与氮化镓(GaN)、砷化镓(GaAs)、稀土离子掺杂钇铝石榴石(Yb:YAG、Nd:YAG)、磷化铟(InP)等激光增益介质构建激光复合器件的研究进展。通过梳理SiC热沉制备工艺如物理气相传输法(PVT)、液相外延法(LPE)和化学气相沉积法(CVD),以及异质键合技术如直接键合、金属化键合和激光辅助键合,重点分析了SiC基激光复合器件在温度均匀性、界面热阻等关键指标上的优化效果。通过高效散热与低应力集成的协同作用,SiC基激光复合器件有望为高功率、高亮度激光系统的热管理难题提供核心解决方案,在工业加工、激光医疗、光通信等领域具有广阔应用前景。

     

    Abstract: To address the thermal management bottleneck that restricts the development of high-power laser systems toward higher power and brightness, this study presents a systematic review of laser composite devices integrating silicon carbide (SiC) heat sinks with various laser gain media, including gallium nitride (GaN), gallium arsenide (GaAs), rare earth ion-doped yttrium aluminum garnet (Yb:YAG or Nd:YAG), and indium phosphide (InP). First, the mainstream fabrication technologies of SiC heat sinks - namely physical vapor transport (PVT), liquid phase epitaxy (LPE), and chemical vapor deposition (CVD) - are outlined. Meanwhile, three representative heterogeneous bonding technologies (direct bonding, metallization bonding, and laser-assisted bonding) are elaborated. Subsequently, temperature uniformity and interfacial thermal resistance are analyzed to evaluate the thermal management efficiency of these composite devices. Owing to the synergistic advantages of efficient heat dissipation and low-stress heterogeneous integration, SiC-based laser composite devices provide a core solution to the thermal management challenges of high-power, high-brightness laser systems. They also exhibit broad application prospects in industrial precision processing, laser medicine, and high-speed optical communications.

     

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