宽频域柔性压阻式压力传感器制备及振动声学测试应用

Preparation and vibration acoustic testing application of broadband flexible piezoresistive pressure sensor

  • 摘要: 柔性压力传感器在可穿戴设备和电子皮肤中具有巨大的应用潜力,现有的柔性压力传感器往往不具备动态刺激与高频振动感知能力。结合多孔材料与金字塔阵列复合分级结构,我们提出了一种压阻式柔性压力传感器,显著提高了柔性传感器的响应时间和恢复时间,能够准确捕捉超过20 kHz的机械刺激。同时,该传感器可以检测到1 Pa的最小压力,并且具有1 Pa至1000 kPa的宽压力传感范围。此外,我们开发了结构振动测试系统和声音测试系统,验证了开发传感器宽频域多功能检测能力,展现了该柔性压阻传感器在高频振动感知和声学应用中的潜力,为柔性可穿戴设备和电子皮肤的开发提供新的设计思路。

     

    Abstract: Flexible pressure sensors have enormous potential for application in wearable devices and electronic skins, but existing flexible pressure sensors often lack the ability to perceive dynamic stimuli and high-frequency vibrations. We propose a piezoresistive flexible pressure sensor that significantly improves the response time and relaxation time of the flexible sensors, and can accurately capture mechanical stimuli exceeding 20 kHz. Meanwhile, the sensor can detect a minimum pressure of 1 Pa and has a wide pressure sensing range of 1 Pa to 1000 kPa. In addition, we have developed a structural vibration testing system and a sound detection system, which have verified the wideband multifunctional detection capability of the developed sensor. This demonstrates the potential of the flexible piezoresistive sensor in high-frequency vibration sensing and acoustic applications, providing new design ideas for the development of flexible wearable devices and electronic skins.

     

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