Abstract: Hydroxyapatite(HA)powder and 20 wt% titanium powder were mixed and sintered to prepare sputtering target. A TiO₂/HA bio-composite film was deposited on the substrate of pure titanium by RF magnetron sputtering. Scanning electron microscopy (SEM) and Energy dispersive spectroscopy (EDS), X-ray diffraction (XRD) and difference temperature analysis (DTA) were used to characterize the as-sputtered films. At the same time, the re-crystallized technique of sputtered films was also investigated. The results show that the sputtered film consists of TiO₂ particles and amorphous phase of calcium phosphate, and the Ca/P ratio is lower than that of HA (Ca/P=1.67) because of elective sputtering and loss of OH^-. The amorphous phase of calcium phosphate is re-crystallized entirely and re-changed into HA partly by water vapour-treating at 700℃ for 0.5 h. There is no micro-crack in the interface between Ti metal and sputtered film treated with water vapour.