对温度不敏感的高稳定互锁微结构柔性压力传感器

Temperature insensitive and highly stable flexible pressure sensors with interlocked microstructure

  • 摘要: 本文旨在提高柔性压力传感器的压力响应范围、稳定性、耐用性和重复性,并减小温度变化对其电阻的影响。通过熔体混炼制备纳米粒子含量为3wt%的多壁碳纳米管/石墨烯/乙烯–辛烯共聚物(MWCNTs/GNP/POE;2.25/0.75/97)、MWCNTs/POE和GNP/POE三种纳米复合材料。结果表明,杂化MWCNTs/GNP可明显减小温度变化对纳米复合材料电阻的影响,并有效提高其压阻响应。采用模压成型制备表面具有微柱和倒微金字塔阵列的MWCNTs/GNP/POE传感基片,将这两种传感基片面对面封装成互锁压力传感器,其呈现高的稳定性、耐用性和重复性,体现为经10 000次的连续循环压缩/释放测试后,其低压区的灵敏度仅减少6.6%,且在15 000次的压缩/释放循环测试过程中呈现稳定的压阻响应,灵敏度保持率高于95%。此外,该传感器具有较宽的压力响应范围(0~235 kPa)、较低的检测限(约11 Pa)、较高的灵敏度和对温度的不敏感性。

     

    Abstract: This work aimed to improve the pressure response range, stability, durability and repeatability of flexible pressure sensor and reduce the influence of temperature change on its resistance. Three kinds of nanocomposites with 3 wt% nanoparticle including multi-walled carbon nanotubes/graphene/poly(ethylene-co-octene) (MWCNTs/GNP/POE; 2.25/0.75/97), MWCNTs/POE and GNP/POE were prepared by using melt mixing. It was demonstrated that the hybrid MWCNTs/GNP can significantly reduce the influence of temperature on the resistance of the nanocomposite and effectively improve its piezoresistive response. MWCNTs/GNP/POE sensing substrates with microcolumn and inverted micropyramid arrays were prepared by using compression molding, and both sensing substrates were assembled into an interlocked pressure sensor face to face. The interlocked sensor exhibits high stability, durability and repeatability. Specifically, the sensitivity in low pressure region is reduced by only 6.6% after 10 000 successive compression/release cycle test; a stable piezoresistive response with a sensitivity retention of higher than 95% can be maintained during 15 000 compression/release cycle testing. Moreover, the interlocked sensor exhibits a wider pressure response range (0~235 kPa), lower detection limit (~11 Pa), higher sensitivity and temperature insensitivity.

     

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