化学气相沉积层状BC<sub><em>x</em></sub>/SiC涂层自愈合机制

化学气相沉积层状BC_x/SiC涂层自愈合机制

摘要: 采用化学气相沉积法(chemical vapor deposition, CVD)在SiC上制备了BC_x涂层, 研究了静态空气条件下BC_x的氧化行为, 并获得BC_x氧化的动力学参数, 对裂纹的愈合时间进行了预测。采用压痕法, 在BC_x/SiC层状结构中预制微裂纹, 以观察B₂O₃玻璃相对裂纹的愈合情况。通过扫描电镜(SEM)对裂纹的愈合情况进行观察, 结果表明, 理论预测结果与实验验证能够很好地吻合。

Abstract: BC_x was prepared on SiC by chemical vapor deposition (CVD) method. Oxidation behavior of BC_x was investigated and the kinetic parameters of BC_x oxidation were obtained under static air. The self-healing time of the cracks pre-prepared in the layered BC_x/SiC structure was predicted. SEM was used to observe the self-healing of the cracks. The results show that the predicted time is in good agreement with the experimental results.