Abstract: The mechanical properties of amorphous Fe_73.5Cu₁Nb₃Si_13.5B₉ alloy powders/silicone rubber piezomagnetic composite film were investigated by the nanoindentation technique. The mechanical responses (hardness and modulus) of the piezomagnetic composite film were obtained by changing the loading rates, peak load and holding time. And the effect of these experimental parameters on nanoindentation measurement was discussed. The reasonable experimental parameters were determined and the creep stress exponent equating was acquired by indentation creep experiments. The feasibility analysis was performed to evaluate the creep behavior of amorphous Fe_73.5Cu₁Nb₃Si_13.5B₉ alloy powders/silicone rubber piezomagnetic composites film by using nanoindentation technology. The results show that the modulus and hardness of the thin film respond more sensitively to the loading rates than do to the peak load. The experimental result is hardly affected by the holding time.