硅烷偶联剂/二氧化硅界面层的表征研究
A STUDY OF THE CHARACTERISTICS OF SILANE/MODEL SiO2 INTERFACE
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摘要: 本文为研究γ-MPS/SiO2界面层厚度与形态,使用自编程序,通过计算机数值模拟和图形分析后确定:当SiO2膜厚为1250~1450Å,激光源入射角为65~75°的最佳椭偏仪测定条件时,灵敏度可提高至1Å,从而能在国产椭偏仪上对10Å左右的界面超薄层膜具有足够的测试灵敏度。实验中应用的SiO2/Si平片是一种新的适宜于作界面研究的玻纤模型。由此模型凭借椭偏仪和扫描电镜,可获得经γ-MPS水溶液处理再经溶剂淋洗后形成的γ-MPS/SiO2界面层的重要信息:界面层结构是1~2个单分子层;形态为连续的膜层,偶尔可见被淋洗去的γ-MPS水解介聚物残留的边缘隆起的椭圆形凹坑。Abstract: In this paper, we have proposed a four-phase moodel(air/silane/SiO2/Si) in which we used a silicon dioxid eplate(SiO2/Si)formed on a monocrystalline silicon as a glass fiber to investigate the thickness and morphology of silane/glass fiber interfaEe,and the interaction ofmodel SiO2 with the dilute aqueous solutions of r-methacryloxypropl-trimethoxysilane(r-MPS)has been studied indetail by using ellipsometry and scanning electron microscopy(SEM).