激光气相合成Si/C/N纳米复合粉

详细信息

SYNTHESIS OF Si/C/N NANOCOMPOSITE POWDERS BY LASER INDUCED GAS PHASE REACTION

State Key Laboratory of Solidification Processing, Northwestern Polytechnical University, Xi'an 710072

摘要

摘要: 本文以大功率CO₂激光器为能源,以廉价的六甲基二硅胺烷[(CH₃)₃Si]₂NH(简称HMDS)和NH₃(加或不加)为原料,合成出纳米非晶Si/C/N复合粉末。研究了HMDS流量和NH₃对粉末组成的影响。结果表明:随HMDS流量(1000～2000ml/min)的升高,粉末的碳含量稍微降低,氢含量稍微升高,而硅、氮含量基本不变。加入NH₃可大幅度降低粉末的碳含量,提高氮含量。粉末的粒径分布范围为10～50nm,为非晶态。在实验范围内,粉末的制备产率为62～113g/h.
- 激光 /
- 六甲基二硅胺烷 /
- NH₃ /
- Si/C/N纳米复合粉
Abstract: Si/C/N nanocom posite powders were synthesized by irradiating a mixture of HMDS and NH₃ with a high power CO₂ laser. The influences of HMDS flow rate and NH₃ on the powder composition were studied. The results show that increasing HMDS flow rate can decrease the carbon content, increase the hydrogen content, and keep the silicon and nitrogen content constant. The addition of NH₃ can greatly decrease the carbon content, and increase the nitrogen content. The asformed powders are amorphous and the mean particle size is 10～50 nm. The production rate of the powder is 62～113 g/h.
- laser, hexamet hyldisilazane, NH₃, Si/C/Nnanocom posite powder /
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