Abstract:
A simple method for fabricating flexible electronic skin based on piezoelectric effect was presented. In order to study the effect of nano modification on the performance of flexible electronic skin, SiO
2/polydimethylsiloxane (PDMS) composite flexible substrate was prepared by using nano-SiO
2 particles as modifiers and PDMS as matrix. The flexible and stable electrodes were prepared and the crack problem of electrode material on flexible PDMS substrate by magnetron sputtering was successfully solved. The functional layer of barium titanium trioxide/carbon nanotubes/PDMS (BaTiO
3/CNTs/PDMS) was implanted in the five-layer structure of the flexible electronic skin that was designed based on the piezoelectric effect. A simple method by varying the substrate roughness was proposed to make a folded contact between the electrode and the dielectric layer. This method improves the conductivity and piezoelectric response of the prepared flexible electronic skin.