LARGE-DISPLACEMENT PZT PIEZOELECTRICS WITH COMPOSITE STRUCTURE
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摘要: 采用PZT作为基体材料,通过化学还原的方法制备了具有大位移驱动能力的复合结构型压电陶瓷。研究了其预制应力的分布,探索了还原制备工艺,测试了驱动性能。结果表明,复合结构的优化设计方案是,还原层厚度比率为0.3;与普通压电陶瓷驱动器相比,复合结构型PZT压电陶瓷具有较低的谐振频率,驱动位移量提高3倍多;还原层相结构中存在二次氧化的基体相,表明其还原工艺仍需改进。Abstract: A new kind of large-displacement piezoelectric ceramics for actuators composed of reduced and un-reduced layers was prepared from PZT by chemical reduction. The distribution of stress inside the composite structure was researched and the chemical reduction conditions were explored. The actuating properties of reduced PZT were studied. It is found that the optimal ratio of reduced layer thickness for the composite structure is 0.3. The reduced composite PZT has lower resonance frequency and 3 times larger displacement than that of the traditional PZT. The re-oxide phases are found in the reduced layer of the composite PZT, showing that the reduction procedure needs to be improved.
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Key words:
- chemical reduction /
- piezoelectric ceramic /
- actuator
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