Abstract: The multi-field coupling relationship in curing process was analyzed according to the problem of process-induced deformation of the composite part prepared in autoclave. Finite element analysis model of curing process of the composite part was developed with mould effect considered. Based on the FEA model, effects of the material, thickness and form of the tool on the process-induced deformation of the part were studied. The results show that the mould has a great effect on the process-induced deformation. The CTE mismatch between the part and the mould affects spring-in angle of the part. The difference of thickness of the tool causes different spring-in angle. The deformation of the part prepared with female mould is less than that of male mould and the direction of deformation is opposite.