INFLUENCE OF BORON ION IMPLANTATION ON THE OXIDATIONBEHAVIOR OF SiC-C/ SiC COMPOSITES
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摘要: 通过等离子体源离子注入法( PSII), 对带有SiC 涂层的C 纤维增强SiC 基(SiC-C/ SiC) 复合材料进行硼离子注入, 研究了硼离子注入对样品抗氧化性能的影响。通过俄歇电子能谱检测分析了样品成份的深度分布。在空气中1300 ℃的高温条件下进行了氧化实验。通过XRD 和扫描电镜分别对样品的化学组成和表面形貌进行了表征, 对样品的力学性能进行了测试。结果表明, 对SiC-C/ SiC 复合材料注入硼有助于提高其抗氧化性能。经过离子注入试样的弯曲性能与未经离子注入试样相比变化很小。
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关键词:
- SiC-C/ SiC /
- 离子注入 /
- 复合材料 /
- 等离子体源
Abstract: CVD-SiC coated C/ SiC composites were implanted with boron ions by plasma source ion implantation toimprove it s oxidation resistance. Depth profile of the boron ions in the boron-implanted SiC-C/ SiC composites waschecked by Auger elect ronic energy spect rum. Oxidation test s of the SiC-C/ SiC composites were performed in flowing dry air at 1300 ℃. The sample with boron ion implantation exhibit s lower mass loss than those without boron ionimplantation. The surface morphology of the sample was obtained by scan elect ronic microscope. Some air bubbleswere observed in the coating. Flexural st rength test s show that the mechanical property of ion-implanted sampleschanges little compared with that of the samples without ion implantation.-
Key words:
- SiC-C/ SiC /
- ion implantation /
- composites /
- plasma source ion implantation ( PSII)
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