Pan Zhengwei, Li Hualun, Zhang Litong. SYNTHESIS OF Si/C/N NANOCOMPOSITE POWDERS BY LASER INDUCED GAS PHASE REACTION[J]. Acta Materiae Compositae Sinica, 1997, 14(2): 35-39.
Citation: Pan Zhengwei, Li Hualun, Zhang Litong. SYNTHESIS OF Si/C/N NANOCOMPOSITE POWDERS BY LASER INDUCED GAS PHASE REACTION[J]. Acta Materiae Compositae Sinica, 1997, 14(2): 35-39.

SYNTHESIS OF Si/C/N NANOCOMPOSITE POWDERS BY LASER INDUCED GAS PHASE REACTION

  • Received Date: 1996-09-10
  • Rev Recd Date: 1996-10-31
  • Publish Date: 1997-06-01
  • Si/C/N nanocom posite powders were synthesized by irradiating a mixture of HMDS and NH3 with a high power CO2 laser. The influences of HMDS flow rate and NH3 on the powder composition were studied. The results show that increasing HMDS flow rate can decrease the carbon content, increase the hydrogen content, and keep the silicon and nitrogen content constant. The addition of NH3 can greatly decrease the carbon content, and increase the nitrogen content. The asformed powders are amorphous and the mean particle size is 10~50 nm. The production rate of the powder is 62~113 g/h.

     

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