Effect of folded contact between electrode and dielectric layer on the performance of piezoelectric flexible electronic skin

ZHANG Jintong; ZHOU Gang; CHEN Guiting; XU Congkang; WANG Jiangyong

doi:10.13801/j.cnki.fhclxb.20200416.002

Volume 37 Issue 12

Dec. 2020

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ZHANG Jintong, ZHOU Gang, CHEN Guiting, et al. Effect of folded contact between electrode and dielectric layer on the performance of piezoelectric flexible electronic skin[J]. Acta Materiae Compositae Sinica, 2020, 37(12): 3194-3200. doi: 10.13801/j.cnki.fhclxb.20200416.002

Citation:

ZHANG Jintong, ZHOU Gang, CHEN Guiting, et al. Effect of folded contact between electrode and dielectric layer on the performance of piezoelectric flexible electronic skin[J]. Acta Materiae Compositae Sinica, 2020, 37(12): 3194-3200. doi: 10.13801/j.cnki.fhclxb.20200416.002

Citation:

ZHANG Jintong, ZHOU Gang, CHEN Guiting, et al. Effect of folded contact between electrode and dielectric layer on the performance of piezoelectric flexible electronic skin[J]. Acta Materiae Compositae Sinica, 2020, 37(12): 3194-3200. doi: 10.13801/j.cnki.fhclxb.20200416.002

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Effect of folded contact between electrode and dielectric layer on the performance of piezoelectric flexible electronic skin

doi: 10.13801/j.cnki.fhclxb.20200416.002

Department of Physics, Shantou University, Shantou 515063, China

Received Date: 2020-02-10
Accepted Date: 2020-04-16

Available Online: 2020-04-17

Publish Date: 2020-12-15

Abstract

Abstract

A simple method for fabricating flexible electronic skin based on piezoelectric effect was presented. In order to study the effect of nano modification on the performance of flexible electronic skin, SiO₂/polydimethylsiloxane (PDMS) composite flexible substrate was prepared by using nano-SiO₂ particles as modifiers and PDMS as matrix. The flexible and stable electrodes were prepared and the crack problem of electrode material on flexible PDMS substrate by magnetron sputtering was successfully solved. The functional layer of barium titanium trioxide/carbon nanotubes/PDMS (BaTiO₃/CNTs/PDMS) was implanted in the five-layer structure of the flexible electronic skin that was designed based on the piezoelectric effect. A simple method by varying the substrate roughness was proposed to make a folded contact between the electrode and the dielectric layer. This method improves the conductivity and piezoelectric response of the prepared flexible electronic skin.
- magnetron sputtering,
- nano-SiO₂,
- flexible electronic skin,
- piezoelectric response,
- flexible sensor
Long Abstrsct
Innovation Points

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References(29)

References

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