基于纳米银颗粒-聚多巴胺-碳纳米管导电材料的三明治型柔性应变传感器

刘彩霞; 卢柏声; 李帅; 马菲; 黄英; 夏悦然

doi:10.13801/j.cnki.fhclxb.20211223.003

基于纳米银颗粒-聚多巴胺-碳纳米管导电材料的三明治型柔性应变传感器

doi: 10.13801/j.cnki.fhclxb.20211223.003

合肥工业大学　物理学院，微电子学院，合肥 230009

基金项目: 中央高校基本科研业务费专项资金(JZ2020HGTB0027；JZ2020HGQA0166)；浙江省“尖兵”“领雁”研发攻关计划项目(2022C03052)

详细信息

通讯作者:
黄英，博士，教授，博士生导师，研究方向为敏感电子学与传感技术　E-mail: hf.hy@163.com

中图分类号: TB383
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出版历程
- 收稿日期: 2021-10-29
- 修回日期: 2021-12-04
- 录用日期: 2021-12-13
- 网络出版日期: 2021-12-24
- 刊出日期: 2022-12-01

Sandwich flexible strain sensor based on silver nanoparticles-polydopamine-carbon nanotube conductive material

School of Physics & School of Microelectronics, Hefei University of Technology, Hefei 230009, China

摘要

摘要: 着眼医疗保健、软机器人和人机交互等领域柔性应变传感器需兼备高灵敏和宽工作应变范围，本文设计基于纳米银颗粒-聚多巴胺-碳纳米管(AgNPs-PDA-CNT)的敏感材料体系，制备一种层层包覆型三明治结构柔性应变传感器。材料表征和特性测试结果表明：借助PDA黏附性和还原性，AgNPs均匀分散且固定在PDA-CNT表面。独特制备工艺使AgNPs-PDA-CNT导电材料紧密结合硅橡胶毛细管内壁和聚二甲基硅氧烷(PDMS)，AgNPs-PDA-CNT渗入PDMS且浓度呈梯度分布。传感器具有高灵敏系数(GF)和宽工作应变范围(0%~44%时GF为69.04，44%~66%时GF为253.13，66%~76%时GF为1253.8)、快速响应(75 ms)和恢复(90 ms)、良好稳定性和重复性。将传感器应用于人体运动精确监测、软体手指本体感知与软抓手抓取行为监测，取得良好应用效果。
- 应变传感器 /
- 碳纳米管 /
- 聚多巴胺 /
- 纳米银颗粒 /
- 聚二甲基硅氧烷 /
- 柔性
Abstract: Since flexible strain sensors require high sensitivity and a wide strain range in healthcare, soft robotics and human-computer interaction, this work designed a flexible strain sensor based on silver nanoparticles-polydopamine-carbon nanotubes (AgNPs-PDA-CNT) sensitive material system, and prepared a layer coated sandwich structure flexible strain sensor. The results of material characterization and property test showed that AgNPs were uniformly dispersed and fixed on the surface of PDA-CNT by virtue of PDA adhesion and reducibility. The AgNPs-PDA-CNT conductive material is closely bonded to the inner wall of silicone rubber capillary tube and polydimethylsiloxane (PDMS). AgNPs-PDA-CNT penetrates into PDMS and the concentration is in gradient distribution. The sensor has high sensitivity coefficient (GF) and wide strain range (69.04 when 0%-44%, 253.13 when 44%-66%, 1253.8 when 66%-76%), fast response (75 ms) and recovery (90 ms), good stability and repeatability. The sensor is applied to human motion monitoring, soft finger ontology sensing and soft grasping behavior monitoring, and good application results are achieved.
- strain sensor /
- carbon nanotubes /
- polydopamine /
- silver nanoparticles /
- polydimethylsiloxane /
- flexible

HTML全文

图 1 纳米银颗粒-聚多巴胺-碳纳米管(AgNPs-PDA-CNT)导电材料 (a) 和应变传感器 (b) 制备流程图

Figure 1. Preparation diagram of silver nanoparticles-polydopamine-carbon nanotubes (AgNPs-PDA-CNT) conductive material (a) and strain sensor (b)

DA—Dopamine; SR—Silicone rubber; PDMS—Polydimethylsiloxane

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图 2 CNT、PDA-CNT和AgNPs-PDA-CNT的XRD图谱 (a) 和XPS能谱 (b)；AgNPs-PDA-CNT的C1s (c)和Ag3d (d) 能谱

Figure 2. XRD patterns (a) and XPS spectra (b) of CNT, PDA-CNT and AgNPs-PDA-CNT; C1s (c) and Ag3d (d) XPS spectra of AgNPs-PDA-CNT

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图 3 CNT (a)、PDA-CNT (b)、AgNPs-CNT (c) 和AgNPs-PDA-CNT (d) 的TEM图像

Figure 3. TEM images of CNT (a), PDA-CNT (b), AgNPs-CNT (c) and AgNPs-PDA-CNT (d)

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图 4 硅橡胶(SR)-(AgNPs-PDA-CNT)/聚二甲基硅氧烷(PDMS)-PDMS的SEM图像

Figure 4. SEM images of silicone rubber (SR)-(AgNPs-PDA-CNT)/polydimethylsiloxane (PDMS)-PDMS

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图 5 柔性应变传感器应变传感机制示意图

Figure 5. Schematic diagram of strain sensing mechanism offlexible strain sensor

F—Applied strain; R_i—Resistance

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图 6 各导电材料对传感器的应变与相对电阻的全程(a) 和40%应变内 (b) 变化关系比较

Figure 6. Comparison of strain and relative resistance of conductive material to sensor in the whole process (a) and within 40% strain (b)

R₀—Initial resistance; ΔR/R₀—Amount of change in relative resistance due to strain; R²—Fit coefficient; GF—Sensitivity coefficient

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图 7 SR-(AgNPs-PDA-CNT)/PDMS-PDMS柔性应变传感器在持续大应变(a)、60%应变瞬态输入响应(b)、5次小应变(c)和大应变(d)下相对电阻随时间的变化

Figure 7. Relative resistance of SR-(AgNPs-PDA-CNT)/PDMS-PDMS flexible strain sensor changes with time under continuous large strain (a), 60% strain transient input response (b), 5 times small strain (c) and large strain (d)

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图 8 导电材料为CNT (a)、PDA-CNT (b)、AgNPs-CNT (c) 和AgNPs-PDA-CNT (d) 的柔性应变传感器40%应变下重复性

Figure 8. Repeatability of flexible strain sensors with conductive materials of CNT (a), PDA-CNT (b), AgNPs-CNT (c) and AgNPs-PDA-CNT (d) at 40% strain

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图 9 SR-(AgNPs-PDA-CNT)/PDMS-PDMS柔性应变传感器的应用：脉搏 (a)、按压 (b)、手指弯曲 (c)、手腕弯曲 (d)、软体手指弯曲角度与相对电阻变化关系 (e) 和软抓手抓取行为感知 (f)

Figure 9. Application of SR-(AgNPs-PDA-CNT)/PDMS-PDMS flexible strain sensor: Pulse (a), compression (b), finger (c) bending, wrist bending (d), relationship between soft finger bending angle and relative resistance (e) and perception of soft grip grasping behavior (f)

P1—Dominant wave; P2—Tidal wave; P3—Dicrotic wave

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