基于电场驱动熔融喷射微3D打印大尺寸宽频电磁屏蔽玻璃复合制造技术及应用

Composite manufacturing technology and application of large-scale and wide-band electromagnetic shielding glass based on electric-field-driven fused deposition micro 3D printing

  • 摘要: 为解决大尺寸宽频透明电磁屏蔽玻璃在高屏效、低成本制造方面存在的难题,设计了一种基于铜@镍@铁@镍异质金属多层核壳网栅的宽频透明屏蔽结构。针对该结构提出一种结合高度补偿电场驱动熔融喷射微3D打印、湿法刻蚀及精密电镀的大尺寸复合制造新工艺。并开展系列研究揭示主要工艺参数对网栅结构的影响规律。以650 mm×650 mm×5 mm的大尺寸不平整(高度差160 μm)玻璃为基底,利用激光测距仪扫描并补偿玻璃不平整引发的高度差,实现高度打印的一致(最大打印高度可达0.9 mm),成功制备出线宽标准差0.45 μm、方阻波动范围±0.25 Ω/sq、可见光透光率80.4%、宽频段(1 MHz~10 GHz)屏蔽效能26.2~57 dB的大尺寸透明电磁屏蔽玻璃(目前已知报道最大尺寸)。该方法为高性能、低成本的大尺寸宽频透明电磁屏蔽玻璃制造提供了全新解决方案。

     

    Abstract: To address the challenges in achieving high shielding effectiveness and low-cost fabrication of large-area, broadband transparent electromagnetic shielding glass, a broadband transparent shielding structure based on a copper@nickel@iron@nickel heterogeneous multi-layer core–shell grid was designed. A novel large-area composite fabrication process was proposed, integrating height-compensated electric-field-driven fused deposition micro 3D printing, wet etching, and precision electroplating. A series of studies were conducted to reveal the influence of key process parameters on the grid structure. Using a large-sized (650 mm×650 mm×5 mm) uneven glass substrate (height difference of 160 μm)as the substrate, laser rangefinder ranging scanning was employed to compensate for surface irregularities, ensuring consistent printing height (with a maximum printing height up to 0.9 mm). As a result, large-area transparent electromagnetic shielding glass was successfully fabricated (currently the largest size reported), featuring a line width standard deviation of 0.45 μm, sheet resistance fluctuation within ±0.25 Ω/sq, visible light transmittance of 80.4%, and broadband shielding effectiveness ranging from 26.2 to 57 dB over 1 MHz to 10 GHz. This method provides a novel solution for the high-performance, low-cost manufacturing of large-area broadband transparent electromagnetic shielding glass.

     

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