基于PDMS改性的具有梯度多孔结构的柔性压阻式压力传感器

A flexible piezoresistive pressure sensor with a gradient porous structure based on PDMS satellite

  • 摘要: 引入多孔结构是提高柔性压阻传感器灵敏度的常用有效手段之一。然而,这种方法使传感器只能在小压力范围内产生高灵敏度,缩小了传感器的检测范围。本文受人体骨骼梯度结构的启发,采用冷冻干燥法以热塑性聚氨酯(TPU)为柔性基体,碳纳米管(CNTs)为导电填料,制作了一种多层梯度泡沫结构的柔性压力传感器,并通过浸泡聚二甲基硅氧烷(PDMS)/石墨烯(Gr)混合液进行改性,实现疏水性。这种传感器具有独特的梯度孔隙结构,允许结构从微小压力到高压变形,能够同时提高灵敏度并扩大压力工作范围。试验结果表明,该传感器具有0~300 kPa宽检测范围和2.609 kPa−1高灵敏度(0~20 kPa)。不仅如此,该传感器还具有(210 ms和230 ms)的快速响应恢复时间和出色的稳定性(承受超过6000次压缩循环测试),以及对复杂环境(高低温、盐雾)表现出较高的适应性。该传感器还可以监测人体运动,这使得柔性压力传感器在压力检测、柔性传感、电子皮肤传感器等领域的应用成为可能。

     

    Abstract: The introduction of porous structures is one of the common and effective means to improve the sensitivity of flexible piezoresistive sensors. However, this method allows the sensor to produce high sensitivity only in a small pressure range, narrowing the detection range of the sensor. In this paper, inspired by the gradient structure of human bones, a flexible pressure sensor with a multilayer gradient foam structure was fabricated by freeze-drying method using thermoplastic polyurethane (TPU) as a flexible matrix and carbon nanotubes (CNTs) as a conductive filler, which was modified by immersing a poly(dimethylsiloxane) (PDMS)/graphene (Gr) mixture to achieve superhydrophobicity. This sensor has a unique gradient pore structure that allows the structure to deform from small pressures to high pressures, enabling simultaneous increases in sensitivity and expansion of the pressure operating range. The test results show that the sensor has a wide detection range of 0~300 kPa and a high sensitivity of 2.609 kPa−1 (0~20 kPa). Not only that, the sensors also have fast response recovery times (210 ms and 230 ms) and excellent stability (withstanding more than 6,000 compression cycle tests), as well as showing high adaptability to complex environments (high and low temperatures, salt spray). The sensor can also monitor human movement, which makes it possible to use flexible pressure sensors in pressure detection, flexible sensing, electronic skin sensors and other applications.

     

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