Citation: | JIA Lintao, WANG Mengqian, LI Aijun, et al. Effect of reactor length diameter ratio on chemical vapor deposition SiC deposition kinetics[J]. Acta Materiae Compositae Sinica, 2021, 38(4): 1200-1209. doi: 10.13801/j.cnki.fhclxb.20201011.002 |
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